How Do You Get a Motion Stage Below 1 μm?
Write the 1 μm acceptance definition clearly, then hold the error with carriage-position feedback, error compensation, thermal management, and work-point geometry. The XMS ±0.75 μm is the compensated axial guarantee, corresponding to a 1.5 μm total band; a material elongation or a scale reading is not directly the work-point positioning error.