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Why Can Direct Drive Reach Sub-Micron?

A linear motor applies force directly to the carriage with no screw in between, eliminating lead error and backlash; positioning precision is then set by the optical linear encoder and rails, so it can reach sub-micron. A coreless mover avoids detent force and is smoothest; an iron-core mover gives more force but has cogging. The cost is higher price, mover mass affecting acceleration, and a magnetic field that needs shielding.

How Do Screw-Driven Stages Achieve Micron Positioning?

A screw-driven stage converts motor rotation to linear travel via a screw. Trapezoidal screws are friction-driven, have backlash, and are cheap; ball screws use ball recirculation, near-zero backlash, and higher precision. Steppers run open-loop from step angle; DC servos use encoder closed-loop, faster and tighter. Motor-axis angle, platform positioning, and workpiece tolerance are three different quantities.

Why Can't Chip Patterns Be Milled?

Turning, milling, and drilling all cut with a pre-made edge — and the limit is not "sharpen the tool a bit." Tool-nose radius sets the ripple, edge radius sets the minimum chip, temperature makes the machine itself grow, and a silicon atom spacing is about 425,000 times smaller than a 0.1 mm end mill. Chip patterns and EUV optical surfaces are therefore not made by cutters.

What Do the 10 μm and 1 μm on a Drawing Actually Measure?

A drawing that says 10 μm or 1 μm is asking about the finished part. ISO 230-2 positioning accuracy A describes a single axis only: an uncompensated 3-axis miller measured 20–33 μm on X; after compensation single-axis A fell to 1.3–1.7 μm while the two-axis ballbar positioning tolerance stayed around 10–13 μm. This article maps the two tolerance levels onto two published machine tests.